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Search for "MEMS and NEMS" in Full Text gives 5 result(s) in Beilstein Journal of Nanotechnology.

Tuning adhesion forces between functionalized gold colloidal nanoparticles and silicon AFM tips: role of ligands and capillary forces

  • Sven Oras,
  • Sergei Vlassov,
  • Marta Berholts,
  • Rünno Lõhmus and
  • Karine Mougin

Beilstein J. Nanotechnol. 2018, 9, 660–670, doi:10.3762/bjnano.9.61

Graphical Abstract
  • adhesion may result in additional energy losses and wear at the interface. When it comes to the nanoscale, high adhesion can completely prevent the fabrication or functioning of micro- and nanoelectromechanical systems (MEMS and NEMS) with movable parts. Strong adhesion is necessary for keeping different
  • substrate material for MEMS and NEMS is silicon. It can be tailored into complex shapes by fine lithography methods. The adhesion between Au and Si or SiO2 is known to be rather poor [18][19][20]. Böhme et al. [21] demonstrated that the oxygen layer forming on the silicon substrates affects the adhesion
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Published 20 Feb 2018

A new approach to grain boundary engineering for nanocrystalline materials

  • Shigeaki Kobayashi,
  • Sadahiro Tsurekawa and
  • Tadao Watanabe

Beilstein J. Nanotechnol. 2016, 7, 1829–1849, doi:10.3762/bjnano.7.176

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  • resistivity manipulated by GBE in nanocrystalline gold thin films The improvement of electrical conductivity or precise control of electrical resistivity is required for the development of high performance electrical and magnetic materials for modern electronic devices such as MEMS and NEMS. It has been
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Published 25 Nov 2016

Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool

  • John D. Parkin and
  • Georg Hähner

Beilstein J. Nanotechnol. 2016, 7, 492–500, doi:10.3762/bjnano.7.43

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  • John D. Parkin Georg Hahner EaStCHEM School of Chemistry, University of St. Andrews, North Haugh, St. Andrews, KY16 9ST, UK 10.3762/bjnano.7.43 Abstract Micro- and nanocantilevers are employed in atomic force microscopy (AFM) and in micro- and nanoelectromechanical systems (MEMS and NEMS) as
  • addition, so-called force curves can reveal information about the interaction between the AFM tip and the surface, thus providing information about local interactions [4]. Cantilever structures also form an integral part of micro- and nanoelectromechanical systems (MEMS and NEMS) [5][6][7] and can be
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Published 30 Mar 2016

Fabrication of high-resolution nanostructures of complex geometry by the single-spot nanolithography method

  • Alexander Samardak,
  • Margarita Anisimova,
  • Aleksei Samardak and
  • Alexey Ognev

Beilstein J. Nanotechnol. 2015, 6, 976–986, doi:10.3762/bjnano.6.101

Graphical Abstract
  • them very attractive for the fabrication of hard nanoimprint lithography molds and etching masks, as well as for nanoelectronic and nanophotonic applications, MEMS and NEMS devices. Experimental Sample preparation All the preparation procedures were conducted in a class 10,000 clean room. The PMMA A2
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Published 17 Apr 2015

Reversible mechano-electrochemical writing of metallic nanostructures with the tip of an atomic force microscope

  • Christian Obermair,
  • Marina Kress,
  • Andreas Wagner and
  • Thomas Schimmel

Beilstein J. Nanotechnol. 2012, 3, 824–830, doi:10.3762/bjnano.3.92

Graphical Abstract
  • successfully demonstrated on the nanometer scale. Keywords: atomic force microscopy; electrochemical deposition; electrochemistry; nanoelectronics; nanofabrication; nanolithography; nanotechnology; MEMS and NEMS; reversible processes; scanning probe microscopy and lithography; Introduction The
  • understand and control electrochemical deposition processes on the nanometer scale. This also applies to the field of micro- and nano-electromechanical systems (MEMS and NEMS). At the same time, much progress was achieved in recent years in understanding the mechanisms and developing new methods for the
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Published 05 Dec 2012
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